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AMAT 0020-31292
Product Name: Gas Distribution Manifold / Injector Assembly
Product Description: A multi-channel precision manifold that mixes and distributes multiple process gases to the chamber showerhead. It ensures precise gas ratios and uniform dispersion for stable deposition/etch processes.
Technical Specifications:
- Material: Electropolished 316L stainless steel
Detailed content
- Number of Channels: 4 independent gas paths
- Port Size: 1/4″ VCR face-seal fittings
- Flow Capacity: Up to 20 SLM per channel
- Design: Internal static mixer for gas homogenization
- Pressure Rating: 300 psig (20.7 bar)
- Cleanliness: UHP cleaned (SC-1 & SC-2 processed)
Key Features:
- Ensures precise gas mixture control for process repeatability
- Minimizes inter-channel cross-contamination
- Smooth, crevice-free internal surfaces prevent particle trapping
- Compatible with all corrosive & inert process gases
- Compact design for easy installation in gas panels
Application Scenarios:
Mounted in AMAT Centura & Endura gas delivery systems. Used for processes requiring precise multi-gas mixtures, such as ALD, HDP-CVD, and atomic layer etch (ALE).
