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AMAT 0020-31216
Product Name: Stainless Steel Chamber Shield Clamp Ring
Product Description: A robust, precision-machined metal ring designed to securely fasten and seal chamber shields and liners. It ensures proper alignment and prevents gas leakage in high-vacuum environments.
Technical Specifications:
- Material: 304 Stainless Steel, passivated
Detailed content
- Design: Split-ring or one-piece design with bolt holes
- Surface Finish: Passivated for corrosion resistance
- Dimensional Tolerance: ± 0.01 mm
- Temperature Rating: Up to 400°C
Functional Features:
- Secure Seating: Holds shields firmly in place during thermal cycling.
- Vacuum Integrity: Ensures a leak-tight seal between components.
- Corrosion Resistance: Resists oxidation and chemical attack.
- Easy Maintenance: Allows for quick removal during PM cycles.
- High Strength: Prevents warping or distortion under clamping force.
Application: Used to clamp quartz and ceramic shields in PVD and Etch chambers.
