Digital guide
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AMAT 0020-30700
- Brand & Part Number: Applied Materials (AMAT) 0020-30700
- Product Name: Precision Machined Aluminum Chamber Liner
- Product Description: A precision-machined aluminum liner designed for semiconductor process chambers. It provides a clean, non-contaminating interior surface while protecting chamber structures from process-induced erosion and deposition.
Detailed content
- Technical Specifications:
- Material: High-purity 6061-T6 aluminum alloy
- Surface Treatment: Electropolished + hard anodized (40μm)
- Thickness: 4.0mm
- Dimensions: Custom-machined for 300mm chamber profiles
- Surface Roughness: Ra ≤ 0.8μm
- Operating Temperature: Up to 550°C
- Cleaning: Class 1 cleanroom packaged
- Functional Features:
- Optimized surface finish minimizes particle generation
- Excellent corrosion resistance to process gases and plasmas
- High thermal conductivity ensures uniform heat distribution
- Low outgassing maintains ultra-high vacuum integrity
- Precision contours optimize gas flow dynamics
- Easy installation and secure mounting
- Applications:
- Liner for PVD, CVD, and etch process chambers
- AMAT Centura and Producer 300mm platforms
- High-purity semiconductor manufacturing processes
