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Technical Specifications:
- Material: 99.5% high-purity aluminum oxide (Al₂O₃) ceramic
- Dielectric Strength: > 15 kV/mm
- Compressive Strength: > 2,000 MPa
- Dimensional Tolerance: ±0.001 inches
Functional Features:
- Excellent electrical insulation to prevent arcing and short circuits
- High thermal stability under extreme process temperatures
- Low outgassing rate suitable for UHV conditions
- Resistant to chemical corrosion from process plasmas
Application: Used as standoffs and spacers for RF electrodes, shields, and chamber components in Etch and PVD chambers.
