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AMAT 0020-27093
Product Name: Ceramic Insulator Washer (Lifter Pin Assembly)
Product Description: A high-purity ceramic washer used as an electrical insulator and spacer in wafer lift pin assemblies. It provides electrical isolation between the metallic lift pin guide and the chamber body.
Technical Specifications:
- Material: 99.6% high-purity alumina (Al₂O₃)
Detailed content
- Dimensions: 10mm OD x 6mm ID x 2mm thick
- Dielectric Strength: > 15 kV/mm
- Temperature Range: -20°C to +800°C
- Surface Finish: Ground to Ra < 0.4 μm
- Density: ≥ 3.9 g/cm³
- Compressive Strength: > 2000 MPa
Key Features:
- Excellent electrical insulation in high-voltage environments
- Zero particle shedding or outgassing
- Chemically inert to all process plasmas
- High mechanical strength under compressive load
- Precision tolerances for consistent lift pin alignment
Application Scenarios:
Used in AMAT Endura PVD & Centura Etch chambers. Installed in lift pin assemblies for 200mm/300mm wafer handling systems.
