Digital guide
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AMAT 0020-26060
Product Name: DC Bias Ceramic Isolator
Product Description: A specialized ceramic component engineered to provide DC electrical isolation while facilitating efficient thermal management in high-power plasma applications. Optimized for withstanding the intense electrical and thermal stresses of DC-biased processes.
Technical Specifications:
- Material: High-purity Alumina (Al₂O₃, 99.9%) or Macor® machinable glass-ceramic
Detailed content
- Dielectric Withstanding Voltage: 25 kV DC minimum
- Thermal Expansion Coefficient: Matched to stainless steel (≈6.5 ppm/°C)
- Compressive Strength: >200,000 psi
- Surface Roughness (Ra): ≤0.4 μm on sealing surfaces
Functional Features:
- Provides superior electrical isolation for DC bias circuits
- Efficiently dissipates heat from high-power components
- Precision-machined for a hermetic seal with metal flanges
- Resistant to dielectric breakdown under high electric fields
- Designed for minimal particle generation during thermal cycling
Application Scenarios: Deployed in semiconductor etch and deposition chambers requiring DC biasing, such as in Applied Materials’ DPS (Decoupled Plasma Source) and MxP chambers, to isolate the pedestal/ESC from ground while allowing thermal conduction.
