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AMAT 0020-25920
Product Name: Ceramic Electrical Insulator
Product Description: A high-performance electrical insulator fabricated from advanced technical ceramic, providing robust dielectric isolation in high-voltage, high-temperature sections of semiconductor plasma chambers.
Technical Specifications:
- Material: High-purity Aluminum Nitride (AlN) or Alumina (Al₂O₃, 99.8%)
Detailed content
- Dielectric Strength: >15 kV/mm
- Thermal Conductivity: >180 W/m·K (for AlN)
- Maximum Operating Temperature: 1700°C (short-term), 1400°C (continuous)
- Volume Resistivity: >10¹⁴ Ω·cm
Functional Features:
- Excellent thermal shock resistance, preventing cracking during rapid thermal transitions
- High mechanical strength to withstand mechanical loads and plasma bombardment
- Low dielectric loss for efficient RF performance
- Chemically inert to process gases (e.g., fluorine, chlorine, oxygen plasmas)
- Non-contaminating, low outgassing properties for UHV (Ultra-High Vacuum)
Application Scenarios: Used for isolating RF electrodes, electrostatic chucks (ESCs), and coil assemblies in PVD, CVD, and ICP (Inductively Coupled Plasma) etch chambers. Critical for preventing electrical arcing and ensuring process stability.
