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AMAT 0020-24099
Brand & Part Number: Applied Materials (AMAT) 0020-24099
Product Name: Ceramic Insulating Standoff
Product Description: A high-purity ceramic component designed to provide electrical isolation and mechanical support for internal chamber components in high-vacuum semiconductor processing environments.
Detailed content
Technical Specifications:
- Material: 99.6% high-purity alumina (Al₂O₃) ceramic
- Dielectric Strength: > 16 kV/mm
- Compressive Strength: > 2,100 MPa
- Operating Temperature Range: -20°C to +500°C
- Dimensional Tolerance: ± 0.001 inches
- Surface Finish: Ground to Ra ≤ 0.8 μm
Functional Features:
- Excellent electrical insulation to prevent arcing in high-voltage RF environments
- Ultra-low outgassing rate compliant with UHV standards
- Chemical inertness to all semiconductor process gases and plasmas
- High mechanical stability under compression and vibration
- Precise machining for consistent alignment and mounting
Application: Used as insulating supports for electrodes, shields, and RF components in Etch, PVD, and CVD chambers.
