Digital guide
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AMAT 0020-24068
- Brand & Part Number: Applied Materials (AMAT) 0020-24068
- Product Name: High-Purity Quartz Liner
- Product Description: A seamless quartz liner designed for vertical thermal process chambers. It provides an inert, contamination-free environment for high-temperature wafer processing with exceptional thermal uniformity and purity.
Detailed content
- Technical Specifications:
- Material: High-purity synthetic amorphous silica (SiO₂)
- Dimensions: 300mm ID × 310mm OD × 450mm length
- Wall Thickness: 5.0mm
- Maximum Operating Temperature: 1250°C
- Internal Surface: Fire-polished (Ra ≤ 0.4μm)
- Total Metal Impurities: < 1ppb
- Optical Transmittance: ≥ 85% at 1μm wavelength
- Functional Features:
- Ultra-high purity prevents contamination during thermal processes
- Excellent thermal uniformity ensures consistent wafer processing
- Inert to all oxidizing, annealing, and doping environments
- Smooth surface minimizes particle generation and accumulation
- High transmittance enables infrared process monitoring
- Low thermal deformation at extreme operating temperatures
- Applications:
- Liner for vertical diffusion and oxidation furnaces
- High-temperature annealing and doping processes
- AMAT thermal processing systems and Centura thermal platforms
- 200mm/300mm wafer thermal manufacturing
