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AMAT 0020-23075
- Brand & Part Number: Applied Materials (AMAT) 0020-23075
- Product Name: High-Purity Quartz Liner Tube
- Product Description: A seamless high-purity quartz liner tube for vertical thermal process chambers. It provides an inert, contamination-free environment for high-temperature wafer processing with excellent thermal shock resistance.
Detailed content
- Technical Specifications:
- Material: High-purity synthetic amorphous silica (SiO₂ ≥ 99.999%)
- Dimensions: Precision-machined for 200mm wafer systems
- Wall Thickness: 3.0 mm ± 0.1 mm
- Maximum Operating Temperature: 1,250°C
- Thermal Expansion Coefficient: ≤ 5.5×10⁻⁷ /°C
- Metal Impurity Content: < 1 ppb total trace metals
- Surface Finish: Fire-polished internal surface
- Functional Features:
- Ultra-high purity prevents wafer contamination
- Excellent thermal shock resistance during rapid thermal cycling
- Inert to all semiconductor process gases and dopants
- Smooth non-porous surface minimizes particle generation
- High transmittance for infrared process monitoring
- Dimensional stability at extreme temperatures
- Applications:
- Liner tubes for vertical diffusion and oxidation furnaces
- High-temperature thermal processes (annealing, oxidation, doping)
- AMAT thermal processing systems and Centura platform chambers
