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AMAT 0020-22584
- Product Name: Insulator, Ceramic, DC Bias
- Product Description: High-purity ceramic insulator engineered for electrical isolation in high-voltage DC bias circuits within semiconductor process chambers.
- Technical Specifications:
- Material: High-purity alumina (Al₂O₃, 99.8%)
Detailed content
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- Dielectric Strength: >25 kV/mm
- Volume Resistivity: >10¹⁵ Ω·cm at 200°C
- Temperature Resistance: Continuous operation up to 800°C
- Compressive Strength: >280 MPa
- Dimensions: Precision-machined to OEM chamber specifications
- Functional Features:
- Provides superior electrical isolation for high-voltage DC bias systems
- Excellent thermal stability and resistance to thermal shock
- Chemically inert to process plasmas, gases, and cleaning agents
- Non-porous structure eliminates particle generation and contamination
- High mechanical strength for reliable performance under vacuum and process loads
- Application Scenarios:
- Deployed in AMAT Endura PVD chambers
- Used in electrostatic chuck (ESC) DC bias subsystems
- Applied in high-power magnetron sputtering processes
- Utilized for electrical isolation in 200mm and 300mm metal deposition systems
- Integrated into ultra-high vacuum (UHV) semiconductor manufacturing environments
