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AMAT 0020-22493
roduct Name: Ceramic Electrical Insulator
Product Description: A high-performance ceramic component engineered to provide electrical isolation between conductive parts within high-voltage or RF process environments.
Technical Specifications:
- Material: High-purity alumina (Al2O3) or boron nitride (BN) ceramic
Detailed content
- Dielectric Strength: High voltage insulation resistance (>10^14 Ω)
- Thermal Conductivity: Excellent heat dissipation properties
- Vacuum Compatibility: Ultra-low outgassing rate
Functional Features:
- Provides robust electrical isolation in high RF/voltage fields.
- Maintains structural integrity and insulation properties at extreme temperatures.
- Resistant to plasma erosion and chemical attack from process gases.
Application Scenarios: Insulating electrodes, RF coils, and high-voltage feedthroughs in semiconductor process chambers.
