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AMAT 0020-22476
Product Name: High-Purity Ceramic Insulator Ring
Product Description: A precision-machined ceramic ring that provides electrical isolation and thermal stability between the RF cathode and chamber ground in PECVD/RIE chambers.
Technical Specifications:
- Material: Aluminum Nitride (AlN, 99.5% purity)
Detailed content
- Outer Diameter: 290 mm
- Inner Diameter: 240 mm
- Thickness: 8 mm
- Thermal Conductivity: 180 W/m·K
- Dielectric Strength: >15 kV/mm
- Maximum Operating Temperature: 1400°C
- Flatness: ≤0.05 mm
- Surface Finish: Ground (Ra <0.8 μm)
Functional Features:
- Excellent electrical isolation for high-voltage RF components
- Superior thermal conductivity for uniform heat distribution
- High mechanical strength and thermal shock resistance
- Chemical inertness to plasma etchants and process gases
- Non-contaminating, ultra-low outgassing for UHV environments
Application Scenarios: Electrical insulation for 200mm/300mm cathodes in AMAT PECVD and Etch chambers (DPS, MXP, and Decoupled Plasma sources).
