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AMAT 0020-22237
Product Name: 8″ Cover Ring with 101% Tin Coverage
Product Introduction: A precision-engineered 8-inch cover ring component with full tin coverage, designed for semiconductor process chambers to ensure uniform process conditions and protect chamber components.
Technical Specifications:
- Wafer Compatibility: 8-inch (200mm) wafer processing systems
Detailed content
- Material: High-purity metal alloy with 101% tin coverage for enhanced performance
- Surface Finish: Ultra-smooth, uniform tin coating for minimal particle adhesion
- Dimensional Tolerance: Precision machining for exact fit in process chambers
- Thermal Stability: Withstands high-temperature process environments
Functional Features:
- Full tin coverage ensures consistent process performance and uniformity
- Protects chamber components from unwanted deposition and chemical attack
- Minimizes particle generation in ultra-clean semiconductor process environments
- Easy installation and replacement during preventive maintenance cycles
- Compatibility with AMAT 200mm wafer processing platforms
Application Scenarios:
- Cover ring for 8-inch wafer CVD and PVD process chambers
- Process uniformity control in semiconductor wafer fabrication
- Protective component for AMAT Centura and P5000 series 200mm systems
- Replacement cover ring for semiconductor equipment maintenance
