Digital guide
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AMAT 0020-21589
Product Name: ESC (Electrostatic Chuck) Insulator Ring / Spacer
Product Description: A high-performance ceramic component that provides electrical isolation and precise spacing for the electrostatic chuck (ESC) assembly within semiconductor process chambers. It separates the chuck electrode from grounded metal structures.
Technical Specifications:
- Material: High-purity alumina (Al₂O₃) ceramic with exceptional dielectric strength.
Detailed content
- Dimensional Tolerance: Machined to tight tolerances (±0.005mm) for precise alignment.
- Dielectric Strength: Minimum 15kV/mm to withstand high RF voltages.
- Temperature Resistance: Continuous operation up to 450°C.
- Surface Finish: Super-finished (Ra < 0.8μm) to prevent particle entrapment.
Functional Features:
- Provides complete electrical isolation between the powered ESC and grounded chamber body.
- Chemically inert to resist corrosion from plasma and process gases (e.g., fluorine, chlorine).
- Excellent thermal stability to maintain consistent spacing during rapid temperature changes.
- Low ionic contamination to preserve wafer cleanliness.
Application Scenarios:
- Integrated into ESC assemblies in PVD, Etch, and CVD chambers (Centura, Endura).
- Critical for 200mm/300mm electrostatic wafer clamping systems.
