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AMAT 0020-20479
Product Description: A high-performance ceramic isolator component used in semiconductor processing equipment to provide electrical isolation between different chamber sections while maintaining mechanical stability and vacuum integrity.
Technical Specifications:
- Material: Machinable aluminum nitride (AlN) ceramic
Detailed content
- Thermal Conductivity: >180 W/m·K
- Dielectric Constant: 8.8 at 1MHz
- Compressive Strength: >2000 MPa
- Operating Temperature: -40°C to +800°C
- Vacuum Compatibility: UHV suitable
- Dimensions: Custom-machined to OEM specifications
Functional Features:
- Exceptional thermal conductivity for efficient heat dissipation
- Excellent electrical insulation properties
- High mechanical strength and shock resistance
- Low thermal expansion coefficient matching silicon wafers
- Chemical inertness to semiconductor process chemicals
- Precision machining for tight dimensional tolerances
Application Scenarios:
- Semiconductor wafer handling systems
- Electrostatic chuck (ESC) assemblies
- Vacuum chamber components
- RF power delivery systems
- High-temperature semiconductor processing equipment
