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AMAT 0020-20403
Product Name: Quartz / Ceramic Viewport / Window Insert
Product Description: A high-purity, transparent window component installed in process chamber walls or lids. It allows visual inspection or optical monitoring of the process environment while maintaining vacuum integrity.
Technical Specifications:
- Material: High-purity fused silica (quartz) or sapphire for maximum optical transmission.
Detailed content
- Form: Precision-ground and polished flat or contoured window.
- Seal: Integral flange for metal gasket sealing (CF or ConFlat).
- Pressure Rating: Full vacuum to 15 psig external pressure.
- Temperature Rating: Withstands continuous exposure to 900°C.
Functional Features:
- High transmission for visible and near-infrared (NIR) wavelengths.
- Excellent resistance to chemical attack from plasma and process vapors.
- Zero porosity to maintain UHV conditions.
- Low fluorescence to prevent interference with optical monitoring systems.
Application Scenarios:
- Used for in-situ process monitoring and end-point detection in Etch and CVD chambers.
- Installed as observation windows on AMAT Centura and Endura chambers.
