Digital guide
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AMAT 0020-14107
- Brand & Part Number: Applied Materials (AMAT) 0020-14107
- Product Name: Quartz Shield Liner Assembly
- Product Description: A multi-component quartz shield assembly for semiconductor process chamber interiors. It provides an inert, high-purity barrier against process deposition and plasma erosion while optimizing gas flow dynamics.
Detailed content
- Technical Specifications:
- Material: High-purity synthetic fused silica (SiO₂ ≥ 99.999%)
- Configuration: 2-piece segmented design
- Wall Thickness: 4.0mm ± 0.1mm
- Maximum Operating Temperature: 1,200°C
- Surface Finish: Fire-polished internal surfaces
- Total Metal Impurities: < 1 ppb
- Fit: Precision-machined for 200mm chamber geometry
- Functional Features:
- Ultra-high purity prevents contamination of sensitive wafer processes
- Excellent chemical resistance to all semiconductor process gases and plasmas
- Low thermal expansion maintains dimensional stability at high temperatures
- Optimized geometry promotes uniform gas flow and plasma distribution
- Smooth non-porous surface minimizes particle accumulation
- Transparent construction enables process visualization and IR monitoring
- Applications:
- Interior shielding in PECVD, LPCVD, and etch chambers
- AMAT Centura WxZ and P5000 deposition platforms
- Processes requiring high-purity quartz chamber components
- High-temperature semiconductor manufacturing environments
