Digital guide
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AMAT 0020-13530
- Brand & Part Number: Applied Materials (AMAT) 0020-13530
- Product Name: High-Purity Alumina Ceramic Shield
- Product Description: A one-piece ceramic shield fabricated from high-purity alumina, designed to protect chamber components from plasma erosion and deposition buildup. It offers exceptional plasma resistance and purity for semiconductor process environments.
Detailed content
- Technical Specifications:
- Material: 99.7% high-purity alumina (Al₂O₃)
- Dimensions: 320mm OD × 300mm ID × 40mm height
- Wall Thickness: 3.0mm
- Surface Finish: Ground to Ra ≤ 0.8μm
- Maximum Operating Temperature: 1450°C
- Dielectric Strength: ≥ 15kV/mm
- Density: ≥ 3.95g/cm³
- Functional Features:
- Excellent resistance to plasma corrosion and chemical attack
- Ultra-high purity prevents contamination of wafer processes
- High thermal stability maintains dimensions at process temperatures
- Low outgassing properties compatible with UHV environments
- Smooth surface minimizes particle generation and accumulation
- Superior electrical insulation properties
- Applications:
- Component shielding in PVD and etch chambers
- Plasma-facing components in AMAT Centura platforms
- High-temperature process environments requiring ceramic protection
- Ultra-high purity semiconductor manufacturing processes
