Digital guide
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AMAT 0020-10202
- Brand & Part Number: Applied Materials (AMAT) 0020-10202
- Product Name: Chamber Shield Assembly
- Product Description: A multi-component shield assembly designed to line the interior of semiconductor process chambers. It protects chamber walls from deposition buildup and plasma erosion while optimizing gas flow dynamics for consistent processing results.
Detailed content
- Technical Specifications:
- Material: High-purity 6061-T6 aluminum alloy
- Surface Treatment: Hard anodized (50μm thickness)
- Configuration: 3-piece segmented design
- Thickness: 3.0mm
- Fit: Precision-machined for 200mm chamber geometry
- Cleaning: Class 10 cleanroom assembled and packaged
- Functional Features:
- Full coverage protection against plasma etching and deposition
- Optimized contours promote uniform gas flow and plasma distribution
- Segmented design allows for individual component replacement
- Low outgassing properties maintain high vacuum integrity
- High hardness anodized coating extends service life
- Easy installation with precision alignment features
- Applications:
- Interior shielding in PVD and dielectric etch chambers
- AMAT Endura 5500/6000 series PVD platforms
- High-volume manufacturing environments with frequent maintenance cycles
