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AMAT 0020-09636 Product Name: Quartz Isolator Sleeve
Product Overview: The AMAT 0020-09636 is a high-purity quartz isolator sleeve designed for electrical insulation and thermal protection in Applied Materials semiconductor equipment. It insulates high-voltage components (electrodes, RF feedthroughs, sensor wiring) from chamber bodies and other conductive parts, preventing electrical arcing and ensuring safe operation in high-temperature, high-vacuum environments. Quartz’s exceptional electrical insulation, thermal stability, and plasma transparency make this sleeve ideal for plasma processing applications.
Technical Specifications:
- Material: High-purity fused quartz (SiO₂), purity ≥ 99.999%, with zero metallic impurities.
Detailed content
- Dimensions: Outer diameter 25mm, inner diameter 15mm, length 60mm, with precision-ground ends.
- Electrical Insulation: Volume resistivity ≥ 1×10¹⁶ Ω·cm at 25°C, dielectric strength ≥ 20 kV/mm.
- Temperature Resistance: Continuous operating temperature up to 1100°C, short-term peak up to 1300°C.
- Thermal Expansion: Coefficient of 0.5×10⁻⁶/°C, matching silicon wafer and ceramic components.
- Plasma Transparency: Transparent to RF and microwave plasma, ensuring unimpeded energy transfer.
- Dimensional Tolerance: ±0.005mm for inner/outer diameters, ensuring precise fit.
- Certification: Complies with SEMI S2/S8 safety standards and quartz material specifications.
Functional Features:
- Provides superior electrical insulation for high-voltage components, preventing arcing and equipment damage.
- Acts as a thermal barrier, protecting sensitive components from extreme chamber temperatures.
- Transparent to plasma energy, ensuring efficient power delivery to process chambers.
- Resists chemical attack and plasma erosion, extending service life.
- Minimizes particle generation, with a smooth, non-porous surface.
- Easy to install and replace, reducing maintenance downtime.
Application Scenarios:
- Installed in AMAT plasma etch, CVD, and PVD chambers for electrode and RF feedthrough insulation.
- Used in high-voltage sensor assemblies and electrical feedthroughs.
- Applied in 200mm and 300mm wafer processing equipment for logic and memory manufacturing.
- Ideal for processes requiring high-temperature stability and plasma transparency.
- Deployed in fabs with strict electrical safety and contamination control requirements.
