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Technical Specifications:
- Material: 99.6% high‑purity alumina ceramic
- Dielectric Strength: >16kV/mm
- Compressive Strength: >2100MPa
- Dimensional Tolerance: ±0.001 inches
- Temperature Range: -20°C to +500°C
Functional Features:
- Excellent electrical insulation to prevent arcing and short circuits
- High thermal stability under cyclic temperature changes
- Ultra‑low outgassing for UHV applications
- Chemical inertness to process plasmas and gases
- High mechanical strength to resist compression and impact
Application: Used as insulating supports for RF electrodes, electrostatic chucks, and chamber components in Etch and PVD systems.
