Digital guide
You are here:
AMAT 0020-08633
Product Name: Stainless Steel Chamber Flange
Product Description: A precision-machined circular flange used to create vacuum-tight seals between chamber body segments, viewports, and feedthroughs in semiconductor process chambers.
Technical Specifications:
- Material: 316L stainless steel
Detailed content
- Diameter: 200mm
- Bolt Circle: 160mm
- Thickness: 15mm
- Surface Finish: Gasket surface Ra ≤ 0.4μm
- Flatness: ≤ 0.02mm across sealing face
- Temperature Rating: -20°C to +200°C
- Vacuum Rating: 10⁻⁹ Torr
Functional Features:
- Precision-machined for optimal seal integrity
- Electropolished for low outgassing and easy cleaning
- Corrosion resistance to process environments
- Standard bolt pattern for universal compatibility
- Stress-relieved to prevent distortion under vacuum
Application Scenarios: Vacuum sealing for chamber lids, feedthroughs, and access ports on AMAT 200mm/300mm PVD/CVD chambers.
