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AMAT 0020-05681
Product Name: Ceramic Electrical Insulator Stand-off
Product Description: A high-purity ceramic component designed to electrically isolate and mechanically support high-voltage electrodes, RF components, and power assemblies within semiconductor vacuum chambers. It offers exceptional dielectric strength and thermal stability.
Technical Specifications:
- Material: 99.6% High-purity alumina (Al₂O₃)
Detailed content
- Dielectric Strength: > 18kV/mm
- Compressive Strength: > 2500MPa
- Thermal Conductivity: ~30 W/m·K
- Maximum Operating Temperature: 1700°C
- Dimensions: 25mm OD × 50mm height (standard)
- Surface Finish: Ground, Ra < 0.6μm
Functional Features:
- Excellent electrical isolation for high-voltage/RF components
- Non-contaminating, low-outgassing material
- High thermal shock resistance
- Chemical inertness to fluorine/chlorine plasmas
- Precision machining for tight dimensional tolerances
Application Scenarios: Insulating RF electrodes, heater assemblies, and electrostatic components in PVD chambers, etch reactors, and ion implantation systems.
