Digital guide
You are here:
AMAT 0020-04541 Precision Support and Positioning Component
Product Description: It is a high-precision support and positioning component applied in semiconductor equipment, which is used to maintain the relative position of key components in the chamber, ensure the consistency and stability of the process, and reduce the failure caused by mechanical offset.
Technical Specifications:
- Material: high-strength, low-pollution special ceramic or alloy
- Dimensional accuracy: micron-level positioning accuracy
Detailed content
- Mechanical performance: high rigidity, not easy to deform
- Cleanliness: ultra-low outgassing and particle release
Functional Features:
- Accurate positioning to ensure process repeatability
- Stable support, adapting to high-speed and high-frequency equipment operation
- Corrosion resistance, suitable for various process environments
- Long service life, reducing maintenance frequency
Application Scenarios:
- Wafer processing and reaction chamber
- Semiconductor manufacturing equipment such as coating and etching
- Wafer transmission and handling system
- Equipment maintenance and replacement parts
