Digital guide
You are here:
AMAT 0020-04518/A Precision Ceramic Insulator Washer
Product Overview: The AMAT 0020-04518/A is a high-precision ceramic insulator washer designed for electrical insulation and mechanical spacing in Applied Materials semiconductor equipment. It insulates metal fasteners and components from conductive parts, preventing electrical arcing and ensuring safe operation in high-voltage, high-temperature environments. Manufactured from high-purity alumina ceramic, this washer delivers exceptional electrical insulation, thermal stability, and mechanical strength.
Technical Specifications:
- Material: 99.99% high-purity alumina (Al₂O₃) ceramic.
- Dimensions: Outer diameter 12mm, inner diameter 6mm, thickness 1.5mm.
Detailed content
- Electrical Insulation: Volume resistivity ≥ 1×10¹⁵ Ω·cm at 25°C, dielectric strength ≥ 25 kV/mm.
- Temperature Resistance: Continuous operating temperature up to 1200°C, short-term peak up to 1400°C.
- Mechanical Strength: Hardness 9 Mohs, compressive strength ≥ 2 GPa.
- Dimensional Tolerance: ±0.003mm for all dimensions, ensuring precise fit.
- Surface Finish: Ground to Ra ≤ 0.1μm, minimizing particle generation.
- Certification: Complies with SEMI S2/S8 safety standards.
Functional Features:
- Provides superior electrical insulation for metal fasteners and components.
- Acts as a mechanical spacer, ensuring precise component alignment.
- Resists high temperatures and thermal shock, maintaining performance.
- Minimizes particle generation, with a smooth, non-porous surface.
- Easy to install and replace, reducing maintenance downtime.
- Compatible with all AMAT metal fastener assemblies.
Application Scenarios:
- Installed in AMAT process chambers, electrical cabinets, and sensor assemblies.
- Used for insulating fasteners in high-voltage components (electrodes, RF feedthroughs).
- Applied in 200mm and 300mm wafer processing equipment for logic and memory manufacturing.
- Ideal for processes requiring high-temperature stability and electrical safety.
- Deployed in fabs with strict contamination control requirements.
