Digital guide
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Detailed content
- Density: ≥3.95 g/cm³
- Dielectric Strength: ≥15kV/mm
- Thermal Conductivity: 25 W/m·K at 25°C
- Dimensions: 160mm outer diameter, 120mm inner diameter, 8mm thickness
Functional Features:
- Provides precise electrical isolation between cathode components
- High dielectric strength for high-voltage PVD applications
- Excellent thermal stability at process temperatures
- Low particle generation for clean deposition environments
- Precision machining for exact dimensional fit
Application Scenarios:
- External cathode assemblies in Endura PVD chambers
- Electrical isolation in physical vapor deposition systems
- High-voltage insulation in semiconductor metallization processes
- Cathode alignment and spacing in PVD platforms
