AMAT 0020-00153
Product Name: Precision Bearing Guide
Product Description: A self-lubricating, high-precision bearing guide for linear motion assemblies, ensuring smooth, low-friction movement in wafer handling and positioning mechanisms.
Technical Specifications:
- Material: 440C stainless steel (hardened)
Detailed content
- Dimensions: 50mm (L) x 15mm (W) x 10mm (H)
- Surface Hardness: 60 HRC
- Clearance: < 0.002mm
- Lubrication: Solid lubricant impregnated
- Load Capacity: 1.5kN (static)
- Operating Temperature: -20°C to +120°C
Functional Features:
- Zero maintenance, self-lubricating design
- High precision for backlash-free motion
- Corrosion and wear resistance for long service life
- Low particle generation for cleanroom use
- Easy press-fit installation
Application Scenarios: Linear guidance for wafer lift pins, slit valves, and robot actuators in AMAT semiconductor processing tools.











