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AMAT 0020-00153

Product Name: Precision Bearing Guide

Product Description: A self-lubricating, high-precision bearing guide for linear motion assemblies, ensuring smooth, low-friction movement in wafer handling and positioning mechanisms.

Technical Specifications:

  • Material: 440C stainless steel (hardened)

Detailed content

  • Dimensions: 50mm (L) x 15mm (W) x 10mm (H)
  • Surface Hardness: 60 HRC
  • Clearance: < 0.002mm
  • Lubrication: Solid lubricant impregnated
  • Load Capacity: 1.5kN (static)
  • Operating Temperature: -20°C to +120°C

    Functional Features:

  • Zero maintenance, self-lubricating design
  • High precision for backlash-free motion
  • Corrosion and wear resistance for long service life
  • Low particle generation for cleanroom use
  • Easy press-fit installation

    Application Scenarios: Linear guidance for wafer lift pins, slit valves, and robot actuators in AMAT semiconductor processing tools.

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