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AMAT 0015-20150
Product Description: A high-performance electrical feedthrough assembly designed for vacuum chamber applications in semiconductor manufacturing equipment. It provides reliable electrical signal and power transmission while maintaining ultra-high vacuum integrity.
Technical Specifications:
- Material: High-purity ceramic insulators with 316L stainless steel housing
Detailed content
- Voltage Rating: 5kV DC/AC
- Current Capacity: 15A per contact
- Number of Contacts: 8-pin configuration
- Vacuum Compatibility: UHV (10^-9 Torr)
- Operating Temperature: -20°C to +150°C
- Leak Rate: <1×10^-9 atm-cc/sec He
Functional Features:
- Hermetically sealed construction for zero vacuum leakage
- High dielectric strength for reliable high-voltage operation
- Corrosion-resistant materials compatible with semiconductor process gases
- Easy installation with standard flange mounting
- Long service life with minimal maintenance requirements
Application Scenarios:
- Semiconductor wafer processing equipment
- PVD (Physical Vapor Deposition) systems
- Etching chambers
- Ion implantation equipment
- Vacuum measurement and analysis instruments
