Digital guide
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AMAT 0015-09091
Product Name: Phasetronics P1038A 3-Phase Lamp Driver
Product Description: A high-power, 3-phase SCR-based lamp driver module designed to precisely control the power output to infrared (IR) heating lamps in semiconductor rapid thermal processing (RTP) systems.
Technical Specifications:
- Input Voltage: 208V AC, 3-phase, 50/60Hz
Detailed content
- Output Power: 15kW (max)
- Control Method: Phase-angle SCR control
- Control Input: 0-10V DC analog
- Output Current: 25A/phase (continuous)
- Cooling: Forced-air convection
- Dimensions: 300mm x 300mm x 200mm
- Weight: 5.4kg
- Operating Temperature: 0°C to +50°C
Functional Features:
- Smooth, flicker-free power regulation
- Fast response time for precise temperature control
- Over-temperature and over-current protection
- Isolated control input for system safety
- High efficiency (>92%) to minimize heat loss
Application Scenarios: Driving IR heating lamps in AMAT P5000 and Centura RTP/PECVD chambers for wafer pre-heat and deposition processes.
