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AMAT 0015-09055
Product Name: Hollow Susceptor Bellows Assembly
Product Description: Flexible vacuum bellows assembly for susceptor height adjustment in semiconductor CVD chambers.
Technical Specifications:
- Material: 316L stainless steel (bellows), 304 stainless steel (flanges)
- Bellows Convolutions: 12
Detailed content
- Bellows Convolutions: 12
- Stroke Length: 50mm
- Vacuum Rating: 10⁻⁹ Torr ultra-high vacuum compatible
- Temperature Resistance: -70°C to +450°C
- Flange Type: 2-inch square bolt pattern
- Weight: 0.25kg
Functional Features:
- Provides flexible, leak-tight vacuum sealing during vertical adjustment
- Maintains ultra-high vacuum integrity throughout full stroke range
- High cycle life for continuous production environments
- Low outgassing properties for high-purity process requirements
- Precision alignment for consistent susceptor positioning
Application Scenarios:
- Susceptor height adjustment in P5000 Mark II CVD chambers
- Vacuum-compatible linear motion applications
- Semiconductor process chamber vertical positioning systems
- High-temperature vacuum process equipment
