Digital guide
You are here:
AMAT 0015-00803
- Product Name: Electrical Feedthrough Assembly
- Product Description: Multi-pin electrical feedthrough for transmitting power and signals across vacuum chamber walls. It provides hermetic sealing and electrical isolation in ultra-high vacuum (UHV) environments.
- Technical Specifications:
- Pin Count: 12-pin configuration
Detailed content
-
- Voltage Rating: 600V AC/DC
- Current Rating: 5A per pin
- Insulation Material: Alumina (Al₂O₃) ceramic
- Seal Type: Copper gasket ConFlat (CF) flange
- Vacuum Range: 1×10⁻¹⁰ Torr to atmospheric pressure
- Temperature Rating: -200°C to +250°C
- Functional Features:
- Hermetic, leak-tight vacuum seal (<1×10⁻⁹ atm-cc/sec He)
- High dielectric strength for high-voltage isolation
- Low outgassing materials for UHV compatibility
- Corrosion-resistant 316L stainless steel body
- Solder-pin terminations for secure wiring
- Direct-mount flange for easy chamber installation
- Applications: Vacuum feedthrough for chamber heaters, pressure sensors, and RF electrodes; used in PVD, CVD, and Ion Implant chambers.
