Digital guide
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AMAT 0015-00284
- Brand & Part Number: Applied Materials (AMAT) 0015-00284
- Product Name: Precision Thermocouple Assembly
- Product Description: A high-accuracy, fast-response thermocouple assembly for precise temperature measurement in semiconductor process chambers. It provides stable, repeatable temperature feedback in high-vacuum and high-temperature environments.
Detailed content
- Technical Specifications:
- Type: Type K (chromel-alumel) thermocouple
- Temperature Range: -100°C to +1,200°C
- Accuracy: ±0.5°C (calibrated)
- Sheath Material: High-purity 316L stainless steel
- Sheath Diameter: 1.5 mm
- Insulation: High-purity magnesium oxide (MgO)
- Response Time: ≤ 0.5 seconds (in air)
- Connection: Standard miniature thermocouple connector
- Functional Features:
- Fast response time captures rapid temperature changes
- High accuracy ensures precise process temperature control
- Vacuum-compatible construction with low outgassing
- Excellent chemical resistance to process gases
- Rugged sheath protects against mechanical damage
- Calibrated output for direct system integration
- Applications:
- Wafer and chuck temperature monitoring in RTP, CVD, PVD chambers
- Thermal process control in AMAT Centura and Endura platforms
- High-temperature vacuum environment temperature measurement
