Digital guide
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AMAT 0010-C8073
- Brand & Part Number: Applied Materials (AMAT) 0010-C8073
- Product Name: High-Purity Gas Filter Assembly
- Product Description: A high-efficiency gas filter assembly designed for ultra-high purity process gas delivery in semiconductor manufacturing. It removes particulate contamination and ensures gas purity at point-of-use in process gas lines.
Detailed content
- Technical Specifications:
- Filter Media: High-purity 316L stainless steel porous metal
- Pore Size: 0.003 μm (3 nanometers)
- Maximum Operating Pressure: 250 PSI
- Maximum Operating Temperature: 120°C
- Connection Type: 1/4″ VCR face-seal fittings
- Housing Material: Electropolished 316L stainless steel
- Cleanliness: Class 1 cleanroom assembled and double-bagged
- Functional Features:
- Sub-micron particulate removal ensures ultra-high purity gas delivery
- Electropolished surfaces minimize particle adhesion and contamination
- Low internal volume reduces gas waste and purge time
- Excellent chemical compatibility with all semiconductor process gases
- Compact design for dense gas panel integration
- Leak-tight construction guarantees integrity in vacuum applications
- Applications:
- Point-of-use filtration for specialty process gases (SiH₄, NH₃, WF₆, etc.)
- Gas delivery systems for CVD, ALD, and epitaxial processes
- AMAT Centura and Endura platform gas distribution networks
- Ultra-high purity semiconductor manufacturing gas lines
