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AMAT 0010-77681
- Brand & Part Number: Applied Materials (AMAT) 0010-77681
- Product Name: Wafer Lift Pin Assembly
- Product Description: A precision-machined wafer lift pin assembly designed for smooth, reliable wafer elevation within semiconductor process chambers. It provides stable, non-contacting wafer support during transfer and processing operations.
Detailed content
- Technical Specifications:
- Material: High-purity polished alumina ceramic (Al₂O₃ 99.7%)
- Dimensions: 3.0mm diameter × 75mm length
- Tip Configuration: Rounded (2.0mm radius) non-marking contact
- Surface Finish: Polished to Ra ≤ 0.4 μm
- Hardness: ≥ 2000 HV (Vickers)
- Compressive Strength: ≥ 2,500 MPa
- Temperature Resistance: Up to 1,450°C continuous
- Functional Features:
- Ultra-smooth surface prevents wafer scratching and particle generation
- High mechanical strength supports wafer weight without deformation
- Excellent thermal stability maintains dimensions at process temperatures
- Chemical inertness prevents contamination in process environments
- Non-porous structure minimizes outgassing in vacuum conditions
- Precision-ground dimensions ensure consistent lift height and alignment
- Applications:
- Wafer lifting in PVD, CVD, etch, and pre-clean chambers
- AMAT Centura, Endura, and Producer series platforms
- 200mm/300mm wafer handling systems requiring non-contact support
- High-purity semiconductor manufacturing processes
