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AMAT 0010-76246
Brand & Part Number: Applied Materials (AMAT) 0010-76246
Product Name: 15-Slot Wafer Storage Elevator Assembly
Product Description: A precision motorized elevator mechanism for storing and retrieving wafer cassettes in semiconductor wafer handling systems, providing vertical positioning and buffer storage.
Detailed content
Technical Specifications:
- Capacity: 15 wafer cassette slots
- Travel Range: 300 mm (vertical)
- Positioning Accuracy: ± 0.1 mm
- Drive System: Stepper motor with optical encoder feedback
- Materials: Anodized aluminum, 304 stainless steel, PEEK
- Operating Environment: Cleanroom Class 1 compatible
- Power Requirements: 24V DC, 2A
Functional Features:
- Smooth, vibration-free vertical motion
- High repeatability for reliable wafer handling
- Integrated position sensors for homing and limit detection
- Modular design for easy installation and maintenance
- Low particle generation for cleanroom compatibility
- Programmable positioning via system controller
Application: Used in wafer handling platforms, load lock chambers, and process equipment front-end modules for temporary wafer storage and buffering.
