Digital guide
You are here:
AMAT 0010-76136
- Product Name: Wafer Lift HTHU Heater Assembly
- Product Description: Heated wafer lift pin assembly with integrated heating elements, maintaining wafer temperature during transfer in high-temperature process modules.
- Technical Specifications:
- Wafer Size: 150mm (6″) / 200mm (8″)
Detailed content
-
- Heating Power: 150W
- Temperature Range: 50–200°C
- Control: Integrated PT100 RTD sensor
- Voltage: 24V DC
- Pin Material: High-purity alumina ceramic
- Insulation: Ceramic thermal isolation
- Functional Features:
- Uniform heating across all lift pins
- Precise temperature control with closed-loop feedback
- Low thermal mass for fast response
- Non-contaminating ceramic components
- Vacuum-compatible construction
- Direct replacement for standard lift assemblies
- Applications: High-temperature wafer handling in HTHU (High Temperature Heater Units) and ALD processes; prevents temperature loss during wafer transfer.
