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AMAT 0010-76005
Product Name: 8″ Robot Blade Assembly
Product Description: A precision-engineered end-effector designed for handling 8-inch (200mm) wafers in semiconductor automation systems. It ensures secure, non-contact transport of wafers between process modules, cassettes, and load ports.
Technical Specifications:
- Material: High-strength anodized aluminum alloy (body), PEEK (contact pads)
Detailed content
- Compatibility: 200mm (8″) wafers
- Length: 320mm
- Width: 40mm
- Thickness: 8mm
- Weight: 280g
- Surface Finish: Electropolished, Ra ≤ 0.8μm
- Temperature Rating: -10°C to +80°C
- Vacuum Compatibility: 10⁻⁷ Torr
Functional Features:
- Ultra-lightweight design for high-speed robot motion
- Low particle generation for cleanroom compliance
- Non-marking PEEK contact pads prevent wafer scratching
- Precision-machined mounting interface for direct robot integration
- Balanced profile for stable, vibration-free transfer
Application Scenarios: Wafer handling in 200mm AMAT Centura/P5000 systems, including PVD, CVD, and Etch process modules.
