Digital guide
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Technical Specifications:
- Material: High-purity alumina ceramic (pin), 316 stainless steel (shaft)
- Length: 120 mm total assembly length
- Diameter: 6 mm ceramic contact tip
- Straightness: ≤ 0.02 mm over entire length
- Surface Finish: Ceramic pin Ra ≤ 0.2 μm
- Operating Temperature: Up to 450°C
- Travel Range: 25 mm vertical lift
Functional Features:
- Ultra-smooth ceramic surface prevents wafer scratching
- High wear resistance for extended service life
- Non-porous ceramic minimizes particle generation
- Precision alignment for consistent wafer lifting
- Vacuum-compatible materials with low outgassing
- Corrosion resistance to all process environments
Application: Used in PVD and Etch chambers to lift 200mm wafers from electrostatic chucks for transfer operations.
