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AMAT 0010-75484
rand & Part Number: Applied Materials (AMAT) 0010-75484
Product Name: Wafer Lift Pin Assembly / Elevator Pin Set
Product Description: A precision mechanical assembly designed to vertically lift and lower wafers onto the electrostatic chuck (ESC) within semiconductor process chambers.
Detailed content
Technical Specifications:
- Material: High-purity alumina ceramic (Al₂O₃) or silicon carbide (SiC) for the pin body; 316 stainless steel for the shaft and base
- Surface Finish: Ra ≤ 0.8 μm, polished to prevent particle generation
- Vertical Travel: 10–25 mm (precision controlled)
- Operating Temperature: -20°C to +450°C
Functional Features:
- Low friction, smooth vertical movement to avoid wafer scratching
- High mechanical strength and wear resistance for long service life
- Chemically inert to prevent contamination in vacuum and plasma environments
- Precision alignment features for stable wafer positioning
Application: Deployed in Etch, PVD, and CVD chambers (Endura, Centura platforms) for 200mm/300mm wafer handling during processing.
