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AMAT 0010-70415

Product Name: Ceramic Heater Ring Assembly

Product Description: High-temperature ceramic heater ring for thermal process applications in semiconductor chambers.

Technical Specifications:

  • Material: Alumina ceramic (Al₂O₃) with tungsten heating elements
  • Diameter: 200mm

Detailed content

  • Power Rating: 800W
  • Voltage: 240V AC
  • Maximum Temperature: 450°C
  • Temperature Uniformity: ±3°C across surface
  • Insulation Resistance: ≥100MΩ at 500V DC
  • Lead Wire: High-temperature silicone insulated

    Functional Features:

  • Rapid heat-up and cool-down cycles
  • Uniform heat distribution for consistent processing
  • High dielectric strength for electrical isolation
  • Excellent thermal shock resistance
  • Long service life under continuous high-temperature operation

    Application Scenarios:

  • Wafer heating in PECVD chambers
  • Thermal processing in semiconductor deposition systems
  • Centura platform thermal components
  • High-temperature process module heating

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