Digital guide
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AMAT 0010-70321
Product Name: Slit Valve Actuator / Door Assembly
Product Description: A complete electromechanical actuator assembly for operating slit valves or chamber doors in semiconductor vacuum systems. It provides reliable, repeatable motion for isolating process chambers during wafer transfer.
Technical Specifications:
- Actuator Type: Pneumatic or servo-electric drive for precise positioning.
Detailed content
- Compatibility: Designed for AMAT P5000 and Centura 5200 platforms.
- Cycle Life: Rated for millions of maintenance-free cycles.
- Sensing: Integrated position sensors (Hall effect or reed switches) for feedback.
- Materials: Stainless steel and hard-anodized aluminum for vacuum compatibility.
Functional Features:
- Fast, smooth, and reliable opening/closing operation.
- Soft-landing capability to prevent particulate generation.
- Manual override capability for maintenance.
- Interlockable with safety and interlock systems.
Application Scenarios:
- Controls slit valves between transfer chambers and process modules (e.g., CVD, Etch, PVD).
- Ensures vacuum integrity and isolation during wafer handling and processing.
