Digital guide
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AMAT 0010-70279
- Product Name: Wafer Lift Pin Assembly
- Product Description: A precision linear actuator assembly used to lift wafers from the electrostatic chuck for robot pick-and-place operations in semiconductor process chambers.
- Technical Specifications:
- Pin Material: High-purity Alumina Ceramic (Al₂O₃)
- Stroke Length: 25mm
Detailed content
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- Actuator Type: Pneumatic cylinder (double-acting)
- Operating Pressure: 6-8 bar (85-115 PSI)
- Repeatability: ±0.05 mm
- Cycle Life: >5 million cycles
- Mounting: Flange mount with bellows seal
- Functional Features:
- Ultra-smooth ceramic pins prevent wafer scratching
- Hermetic bellows seal for vacuum compatibility
- Precision linear guides for wobble-free movement
- Integrated magnetic position sensors
- Corrosion-resistant 316 stainless steel components
- Adjustable end-of-travel stops
- Direct replacement for OEM lift assemblies
- Applications: Wafer handling in PVD, CVD, and Etch chambers; 300mm wafer lift pins for Centura & Endura platforms.
