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AMAT 0010-70166
Product Name: 15-Slot Cleanroom Storage Elevator Assembly
Product Description: Automated wafer cassette storage and handling elevator for semiconductor cleanroom environments.
Technical Specifications:
- Capacity: 15 wafer cassette slots
- Compatibility: Standard 200mm wafer cassettes
Detailed content
- Drive System: Servo-controlled precision motor
- Positioning Accuracy: ±0.1mm
- Material: Hard-anodized aluminum alloy
- Cleanroom Class: Class 100 compatible
- Dimensions: 120cm (H) × 60cm (W) × 45cm (D)
Functional Features:
- Automated vertical positioning of wafer cassettes
- Smooth, vibration-free motion prevents wafer damage
- Integrated position sensors for precise slot alignment
- Cleanroom-compatible low-particle design
- Programmable positioning sequences for automated handling
Application Scenarios:
- Wafer cassette storage in P5000 semiconductor systems
- Cleanroom material handling for 200mm wafer fabrication
- Automated wafer fab storage and retrieval systems
- Semiconductor front-end equipment interface modules
