Digital guide
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AMAT 0010-70162
Product Name: Slit Valve Actuator Assembly
Product Description: A precision pneumatic actuation assembly engineered to control the opening and closing of slit valves in semiconductor process chambers, ensuring vacuum isolation and reliable wafer passage between process modules.
Technical Specifications:
- Actuation Type: Pneumatic, double-acting cylinder
Detailed content
- Operating Pressure: 4.5–6.5 bar
- Stroke Length: 35 mm
- Position Feedback: Dual inductive proximity sensors (NPN)
- Material: 316L stainless steel (body), PTFE seals
- Mounting: ISO 6431 standard flange
- Temperature Rating: -10°C to +85°C
- Vacuum Compatibility: 10⁻⁹ Torr
- Cycle Life: >5,000,000 cycles
Functional Features:
- Non-contact position sensing for maintenance-free operation
- Fail-safe lock mechanism to secure valve position during power loss
- Corrosion-resistant construction for harsh process environments
- Precision linear guidance for smooth, repeatable actuation
- Quick-connect fittings for fast installation and service
Application Scenarios: Slit valve control in 200mm/300mm PVD (Endura), CVD (Centura), and Etch chambers for wafer transfer isolation.
