Digital guide
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AMAT 0010-70131
- Product Name: Wafer Lift Pin Actuator Assembly
- Product Description: Pneumatic actuator assembly for driving wafer lift pins, providing vertical motion to lift wafers off electrostatic chucks for robot transfer.
- Technical Specifications:
- Actuator Type: Double-acting pneumatic cylinder
Detailed content
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- Stroke: 25 mm
- Operating Pressure: 6–8 bar (85–115 PSI)
- Repeatability: ±0.05 mm
- Bellows Seal: 316L stainless steel welded bellows
- Materials: 316 Stainless Steel, UHMWPE bearings
- Cycle Life: >5 million cycles
- Functional Features:
- Vacuum-compatible hermetic bellows seal
- Precision linear guides for zero wobble
- Integrated magnetic position sensors
- Adjustable end stops
- Corrosion-resistant materials
- Low friction, maintenance-free operation
- Applications: Wafer handling in 200mm/300mm PVD, CVD, and Etch chambers; compatible with Centura and Endura platforms.
