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AMAT 0010-70058
Product Name: High-Precision Thermal Control Assembly
Product Introduction: A specialized thermal control assembly for semiconductor manufacturing equipment, delivering precise temperature regulation for critical process components.
Technical Specifications:
- Temperature Range: -20°C to +450°C (-4°F to 842°F)
Detailed content
- Control Accuracy: ±0.5°C for precise thermal regulation
- Heating/Cooling: Integrated resistive heating and liquid cooling channels
- Material: High-thermal-conductivity aluminum alloy with ceramic insulation
- Interface: Standard thermocouple and control signal connections
- Compatibility: AMAT Centura 5200 DPS etch systems
Functional Features:
- Delivers precise, stable temperature control for process-critical components
- Rapid thermal response for fast process setup and stabilization
- Uniform thermal distribution across heated surfaces
- Built-in over-temperature protection for equipment safety
- Low outgassing design for ultra-high vacuum (UHV) compatibility
Application Scenarios:
- Thermal control in semiconductor etch and deposition process chambers
- Heater assembly for AMAT Centura 5200 DPS systems
- Replacement thermal component for semiconductor equipment maintenance
- Critical thermal management for 200mm wafer fabrication processes
