Digital guide
You are here:
AMAT 0010-56351 Wafer Lift Pin Assembly
Product Description: A precision-engineered wafer lift pin assembly designed for vertical movement of 200mm wafers within semiconductor process chambers. It provides smooth, repeatable wafer positioning between the pedestal and transfer robot, ensuring reliable wafer handling without damage.
Technical Specifications:
- Wafer Compatibility: 200mm (8-inch) wafers
- Pin Material: High-purity alumina (Al₂O₃) ceramic
- Pin Diameter: 6mm
Detailed content
- Pin Length: 150mm (extendable)
- Stroke Length: 50mm vertical travel
- Actuation: Pneumatic (24V DC solenoid control)
- Positioning Accuracy: ±0.05mm
- Repeatability: ±0.02mm
- Operating Temperature: 0–200°C
- Enclosure Rating: IP65 (dust-tight, protected from low-pressure water jets)
Functional Features:
- Smooth, vibration-free vertical movement for gentle wafer handling
- Ceramic pins resist chemical corrosion and high-temperature exposure
- Non-contact position sensing for precise height control
- Self-lubricating bearings for maintenance-free operation
- Adjustable stroke length for different chamber configurations
- Compatible with standard AMAT wafer handling robots
- Fail-safe design prevents wafer damage during power loss
Application Scenarios:
- Wafer transfer between load locks and process chambers
- Vertical positioning in PVD, CVD, and etch chambers
- Wafer centering and alignment in pre-clean chambers
- Lift pin assemblies in thermal processing chambers
- Wafer handling in metrology and inspection stations
