Digital guide
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AMAT 0010-38838
- Brand & Part Number: Applied Materials (AMAT) 0010-38838
- Product Name: Heater Pedestal Assembly
- Product Description: A complete heater pedestal assembly for semiconductor process chambers, integrating a heating element, thermal isolation, and wafer support. It provides precise, uniform heating for wafers during deposition and annealing processes.
Detailed content
- Technical Specifications:
- Heating Element: High-purity resistance heating alloy
- Temperature Range: 50°C to 450°C
- Uniformity: ±2°C across wafer surface
- Material: Aluminum nitride (AlN) or anodized aluminum
- Power Rating: 800–1,500W (depending on configuration)
- Control: Integrated thermocouple for closed-loop temperature control
- Mounting: Flange-mounted for vacuum chamber installation
- Functional Features:
- Excellent temperature uniformity for consistent wafer processing
- Fast heat-up and cool-down cycles improve throughput
- High thermal conductivity ensures efficient heat transfer
- Vacuum-compatible materials with low outgassing
- Integrated thermal isolation minimizes chamber heat load
- Rugged construction for continuous 24/7 operation
- Applications:
- Wafer heating in PVD, CVD, and ALD process chambers
- AMAT Centura and Endura platform heater pedestals
- Precision thermal processing for 200mm/300mm semiconductor wafers
