Digital guide
You are here:
AMAT 0010-38626
- Brand & Part Number: Applied Materials (AMAT) 0010-38626
- Product Name: Precision Heater Pedestal Assembly
- Product Description: A single-zone precision heater pedestal engineered for uniform wafer heating in semiconductor process chambers. It delivers exceptional thermal uniformity and stability for deposition and thermal treatment applications.
Detailed content
- Technical Specifications:
- Material: High-purity anodized 6061-T6 aluminum alloy
- Heating Element: Alloy-embedded resistive heater
- Temperature Range: 50°C to 450°C
- Temperature Uniformity: ±1.0°C across 200mm wafer
- Power Rating: 1.0kW
- Temperature Sensor: Integrated Class A PT100 RTD
- Surface Flatness: ≤ 10 μm across contact surface
- Functional Features:
- Excellent thermal conductivity ensures rapid, uniform heating
- Low outgassing design maintains ultra-high vacuum integrity
- Precision machining guarantees perfect wafer contact
- Rugged construction withstands thermal cycling stress
- Corrosion-resistant anodized surface extends service life
- Direct-fit replacement for original equipment assemblies
- Applications:
- Wafer heating in PVD, ALD, and CVD process chambers
- Thermal processing applications requiring tight temperature control
- AMAT Centura and Endura 200mm wafer platforms
- High-volume manufacturing environments with strict uniformity requirements
